Linear Interferometer


Features:

  • Small size (60x60x300 mm)
  • Application of notebook
  • Easy operation
  • Low price
  • High resolution
  • High accuracy
  • Small size measurement optics

Measurement abilities:

  • Linear positioning
  • Angular positioning
  • Rotary positioning
  • Straightness
  • Flatness
  • Squareness
  • Velocity

Measurement Parameters

Measurement Range Resolution Accuracy
Distance 0-30 m 0,001 µm ± 0,41 ¼m/m in air
± 0,9 ¼m/m for steel
Velocity 0-0,3 m/s (0,1 m/s)* 0.25 µm/s 0,1%
Angular 0-3600 arc sec 0,01 arc sec ±0,1%
Straightness(with angular optics) 0 – 12 (± 3 mm flatness measurement range) 0.02 µm (for 100 mm base) ± 0,5%
Straightness measurement (with 3D measurement) 0-10 m 0,1 µm ± 5 ¼m x L(L in meters)
Straightness measurement (with wollaston prism ) 0-3m 0,8 – 10 m (± 3 mm flatness measurement range) 0,01 ¼m 0,1 ¼m ±1%
± 2,5 %
Flatness** 0-12 m (± 3 mm) ± mm flatness measurement range) 0,02 µm ( for 100 mm base) ± 0,5 %
Squareness(3D measurement) 0-6 m 1 arc sec ±2″
Squareness(Wollaston prism) ± 1000 arc sec 0,03 arc sec ±1% ± (1,5 arc sec)
Rotary Positioning ±5 2 arc sec ±0,2 %